Abatement of CF4 Using RF Plasma with Annular Shape Electrodes Operating at Low Pressure
نویسندگان
چکیده
منابع مشابه
Inactivation of Gram-Negative Bacteria by Low-Pressure RF Remote Plasma Excited in N2-O2 Mixture and SF6 Gases
The role of low-pressure RF plasma in the inactivation of Escherichia coli O157, Klebsiella pneumoniae, Proteus mirabilis, and Enterobacter sakazakii using N2-O2 and SF6 gases was assessed. 1×109 colony-forming units (CFUs) of each bacterial isolate were placed on three polymer foils. The effects of pressure, power, distance from the source, and exposure time to plasma gases were optimized. The...
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ژورنال
عنوان ژورنال: Journal of Korean Society for Atmospheric Environment
سال: 2010
ISSN: 1598-7132
DOI: 10.5572/kosae.2010.26.6.690